Alcatel 601E Deep Reactive Ion Etcher

Plasma Etchers & PECVD
Model:
Alcatel 601E Deep Reactive Ion Etcher for sale
Price:
Request Price Quote     ID#:  4369
Picture:
He Backside Cooling, Mechanical Clamp
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Details:

ALCATEL 601E DRIE (DEEP REACTIVE ION ETCHER) consisting of:

- Model 601E Deep Reactive Ion Etcher
- Currently set up for 6" wafers
- Mechanical Clamp
- Backside He Cooling
- RFPP RF20S RF Generator
- RFPP LF-5 RF Generator
- Alcatel Adixen Turbo Pump
- Vacuum Pump & Chiller
- Pump
- Chiller

Current Gas Configuration:
- SF6
- C4F8
- CHF3
- O2
- AR
- N2

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:
Price:
      ID#:  4369