KLA-Tencor 5200XP

Surface Metrology
Model:
KLA-Tencor 5200XP for sale
Price:
Request Price Quote     ID#:  3553
Picture:
 8"/200mm Wafer Capable, Fully Automated Non-Contact Box-In-Box Measurement
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Details:

KLA-TENCOR 5200XP OVERLAY REGISTRATION SYSTEM consisting of:
 
   
- Model: 5200XP 
- Overlay Registration(stepper alignment) and Critical Dimension (CD) Measurement System
- 8"/200mm Wafer Capable System
- Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment).  The Overlay Registration specification is 4nm per KLA’s published spec sheet
- Fully Automated Non-Contact CD Measurement and we recommend it to be used for CD’s the size of 1.5um or above
- Uses Proven Coherence Probe Microscopy (CPM) Technology
- Lowers Stepper Cost of Ownership.  Includes KLASS (KLA Stepper Set-up Software) which allows the calculation of critical parameters for overlay control on lithography tools
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System 
- Refurbished to Meet Published KLA-Tencor 5200XP Specifications
- We can include installation, training, and warranty
 
 

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

6-8 weeks

Price:
      ID#:  3553